Scanning Probe Lithography

Nonfiction, Science & Nature, Technology, Material Science, Electronics, Circuits
Cover of the book Scanning Probe Lithography by Hyongsok T. Soh, Kathryn Wilder Guarini, Calvin F. Quate, Springer US
View on Amazon View on AbeBooks View on Kobo View on B.Depository View on eBay View on Walmart
Author: Hyongsok T. Soh, Kathryn Wilder Guarini, Calvin F. Quate ISBN: 9781475733310
Publisher: Springer US Publication: March 14, 2013
Imprint: Springer Language: English
Author: Hyongsok T. Soh, Kathryn Wilder Guarini, Calvin F. Quate
ISBN: 9781475733310
Publisher: Springer US
Publication: March 14, 2013
Imprint: Springer
Language: English

Scanning Probe Lithography (SPL) describes recent advances in the field of scanning probe lithography, a high resolution patterning technique that uses a sharp tip in close proximity to a sample to pattern nanometer-scale features on the sample. SPL is capable of patterning sub-30nm features with nanometer-scale alignment registration. It is a relatively simple, inexpensive, reliable method for patterning nanometer-scale features on various substrates. It has potential applications for nanometer-scale research, for maskless semiconductor lithography, and for photomask patterning.
The authors of this book have been key players in this exciting new field. Calvin Quate has been involved since the beginning in the early 1980s and leads the research time that is regarded as the foremost group in this field. Hyongsok Tom Soh and Kathryn Wilder Guarini have been the members of this group who, in the last few years, have brought about remarkable series of advances in SPM lithography. Some of these advances have been in the control of the tip which has allowed the scanning speed to be increased from mum/second to mm/second. Both non-contact and in-contact writing have been demonstrated as has controlled writing of sub-100 nm lines over large steps on the substrate surface. The engineering of a custom-designed MOSFET built into each microcantilever for individual current control is another notable achievement. Micromachined arrays of probes each with individual control have been demonstrated. One of the most intriguing new aspects is the use of directly-grown carbon nanotubes as robust, high-resolution emitters.
In this book the authors concisely and authoritatively describe the historical context, the relevant inventions, and the prospects for eventual manufacturing use of this exciting new technology.

View on Amazon View on AbeBooks View on Kobo View on B.Depository View on eBay View on Walmart

Scanning Probe Lithography (SPL) describes recent advances in the field of scanning probe lithography, a high resolution patterning technique that uses a sharp tip in close proximity to a sample to pattern nanometer-scale features on the sample. SPL is capable of patterning sub-30nm features with nanometer-scale alignment registration. It is a relatively simple, inexpensive, reliable method for patterning nanometer-scale features on various substrates. It has potential applications for nanometer-scale research, for maskless semiconductor lithography, and for photomask patterning.
The authors of this book have been key players in this exciting new field. Calvin Quate has been involved since the beginning in the early 1980s and leads the research time that is regarded as the foremost group in this field. Hyongsok Tom Soh and Kathryn Wilder Guarini have been the members of this group who, in the last few years, have brought about remarkable series of advances in SPM lithography. Some of these advances have been in the control of the tip which has allowed the scanning speed to be increased from mum/second to mm/second. Both non-contact and in-contact writing have been demonstrated as has controlled writing of sub-100 nm lines over large steps on the substrate surface. The engineering of a custom-designed MOSFET built into each microcantilever for individual current control is another notable achievement. Micromachined arrays of probes each with individual control have been demonstrated. One of the most intriguing new aspects is the use of directly-grown carbon nanotubes as robust, high-resolution emitters.
In this book the authors concisely and authoritatively describe the historical context, the relevant inventions, and the prospects for eventual manufacturing use of this exciting new technology.

More books from Springer US

Cover of the book The A-Z Reference Book of Childhood Conditions by Hyongsok T. Soh, Kathryn Wilder Guarini, Calvin F. Quate
Cover of the book Advances in Ocular Toxicology by Hyongsok T. Soh, Kathryn Wilder Guarini, Calvin F. Quate
Cover of the book Nitric Oxide in Transplant Rejection and Anti-Tumor Defense by Hyongsok T. Soh, Kathryn Wilder Guarini, Calvin F. Quate
Cover of the book Cervix Cancer by Hyongsok T. Soh, Kathryn Wilder Guarini, Calvin F. Quate
Cover of the book The Interpretation of Archaeological Spatial Patterning by Hyongsok T. Soh, Kathryn Wilder Guarini, Calvin F. Quate
Cover of the book Mechanisms of Cerebral Hypoxia and Stroke by Hyongsok T. Soh, Kathryn Wilder Guarini, Calvin F. Quate
Cover of the book Financial Intermediation in Europe by Hyongsok T. Soh, Kathryn Wilder Guarini, Calvin F. Quate
Cover of the book HACCP by Hyongsok T. Soh, Kathryn Wilder Guarini, Calvin F. Quate
Cover of the book Potentiating Health and the Crisis of the Immune System by Hyongsok T. Soh, Kathryn Wilder Guarini, Calvin F. Quate
Cover of the book Transfusion Medicine: Fact and Fiction by Hyongsok T. Soh, Kathryn Wilder Guarini, Calvin F. Quate
Cover of the book Sensors by Hyongsok T. Soh, Kathryn Wilder Guarini, Calvin F. Quate
Cover of the book Freud and Modern Psychology by Hyongsok T. Soh, Kathryn Wilder Guarini, Calvin F. Quate
Cover of the book The Toxicant Induction of Irritant Asthma, Rhinitis, and Related Conditions by Hyongsok T. Soh, Kathryn Wilder Guarini, Calvin F. Quate
Cover of the book Clinical Applications of Medical Imaging by Hyongsok T. Soh, Kathryn Wilder Guarini, Calvin F. Quate
Cover of the book Simulators in Anesthesiology Education by Hyongsok T. Soh, Kathryn Wilder Guarini, Calvin F. Quate
We use our own "cookies" and third party cookies to improve services and to see statistical information. By using this website, you agree to our Privacy Policy